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Esec 2100 hS ix

The Esec 2100 hS ix is the latest member of the 2100 i Die Bonder family. It is optimized for highest speed and scratch-free transport thanks to the easy-to-use motorized and programmable rail strip handler.

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10 micron Die placement accuracy

upto 18,500 UPH

0.2 - 10 N Bond force

>200 h MTBF

Key Features

Explore all features of the Esec 2100 hS ix

New generation designs

  • High Resolution 4mega pixel Vision Systems
  • Motorized and Programmable Rail Strip Handler with three clamps, optimized for scratch free production
  • New reliable Strip push out to Magazine by Clamp
  • New Dual Universal Top Stack and Magazine Input Handler
  • New All-in-One Expansion unit for all frame sizes

 

Optimized productivity

  • Motorized Rail Strip Handler allowing working position as close to Wafer as possible
  • Superior and proven P&P design with High Performance P&P Y-axis and speed optimized trajectories
  • Speed Optimized Soft Pick and Bond Processes
  • Dual 5 bar Pneumatic Dispense System with independent writing axis and pressure control

 

Optimized process control

  • High Accuracy Production Modes
  • Low Contrast Object detection vision capability
  • Up to three calibrated Dual Color Light Sources per camera
  • Full High Definition (FHD) Graphical User Interface with multiple camera inspection images and Viewers

 

New generation options

  • Speed optimized Pneumatic Downholder System
  • High Precision Bond Head with highly accurate Theta Axis
  • High Accuracy closed loop P&P Z Axis
  • New High Resolution Up looking Vision System
  • Automatic Tool Setups and Optimization

Specifications

The Esec 2100 hS ix in numbers

Die placement accuracy

>2 mm: 18 μm / 0.2° (3σ) (high speed mode)
2 mm: 12 μm / 0.2° (3σ) (accuracy mode)
>2 mm: 10 μm / 0.15° (3σ) (up looking vision)
0.5 – 2mm: 20 μm / 1.0° (3σ)

 

Performance

Output Up to 18500 UPH
MTBF > 200h

 

Bond process

Bond force 0.2 – 10 N
Bond rotation 360°
Bond heating programmable, max. 170 °C (simple DAF only)

 

Strip Dimensions

Width (standard) 58 – 10 2mm
Width (with narrow kit*) 23 – 67 mm
Length 90 – 300 mm
Thickness 0.1 – 0.5 mm

* Option or accessory may be required

 

Wafer and Die Dimensions

Wafer size: 4” – 12”
Frame size 8” – 12”
Die size* 0.15 – 8 mm
Die thickness > 0.075 mm

 

Machine Dimensions

Footprint WxDxH – 1,785 x 1,448 x 1,400 mm
Weight approx. 1,400 kg

 

Options

Available options on the Esec 2100 hS ix

Substrate handler

  • Strip Handler 100 mm hot Rail motorized
  • Rail Downholder
  • Pneumatic Downholder
  • Magazine Handler Input
  • SMEMA Link Input
  • SMEMA Link Output
  • Strip Marking Unit

 

Pick & Place

  • Beam Die Sensor
  • High Precision Bond Head
  • Liquid Cooling System

 

Die ejector

  • Dual Stage Die Ejector

 

Vision

  • Dual Dispense Indirect Illumination
  • Dual Dispense Vertical Indirect Illumination
  • Bond Direct Illumination
  • Bond Vertical Indirect Illumination
  • Uplooking Vision

 

Automation

  • Wafer Mapping inclusive Conversion
  • Transfer Logging
  • Material Tracking

 

Miscellaneous

  • Uninterruptible Power Supply to PC
  • Ionizer-Controlled Pick
  • Ionizer-Controlled Bond
  • Ionizer-Controlled Dispense
  • Ionizer-Controlled WH Load Top
  • Ionizer-Controlled WH Load Bottom
  • Ionizer-Controlled Magazine Input
  • Fine Filter Unit
  • Fine Filter Unit with Air Particle Sensor

 

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